In this paper, first a circular diaphragm is modeled using the classical plate theory.
An analytical solution based on differential transformation method (DTM) and Runge-Kutta
method is employed for solving the governing differential equation for the first time. Then the
influences of various parameters on central deflection of the diaphragm, stress distribution and
capacitance of pressure sensor with a time-dependent pressure are examined. Several case studies
are compared with simulations to confirm the proposed method. The analytical results compared
with ABAQUS simulation show excellent agreement with the simulation results. This method is
very promising for time saving in calculating micro-device characteristics.